微圆弧金刚石刀具车削锗单晶衍射元件

收稿日期:2013-03-10;修订日期:2013-04-28

基金项目:国防基础科研计划(A0920110019)

作者简介:李军琪(1971-),男,高级工程师,主要从事金刚石工艺及加工研究工作。Email:lijunqi90@https://www.wendangku.net/doc/5a8356126.html, 微圆弧金刚石刀具车削锗单晶衍射元件

李军琪1，张云龙1，苏军1，汪志斌1，郭小岗1，宗文俊2，张磊2

(1.西安应用光学研究所，陕西西安710065；2.哈尔滨工业大学精密工程研究所，黑龙江哈尔滨150006)摘要:锗单晶衍射光学元件具有特有的色散和温度特性，在红外光学领域，具有广阔的应用前景。衍射元件必须同时满足光学镜面及相位转变点的要求，采用微圆弧金刚石单点车削是解决这一途径的主要方法之一，但采用微圆弧刀具加工时，要求同时满足粗糙度和相位突变点是加工衍射元件的难点，因此，研究微圆弧金刚石刀具车削锗单晶衍射元件具有重大意义。基于DEFORM 3D 切削仿真软件，对金刚石刀具车削锗单晶材料进行了仿真分析，分析了切削参数、刀具参数对锗单晶材料粗糙度的影响，并依据仿真试验结果优选切削参数以及刀具参数进行试验，R 0.1mm 微圆弧刀具车削单晶材料粗糙度达到4nm 。

关键词:单点金刚石车削；切削仿真；衍射光学元件；表面粗糙度

中图分类号:TN214文献标志码:A 文章编号:1007-2276(2013)11-3053-06

Turning of DOE Ge single crystal with

micro-circle diamond tool

Li Junqi 1,Zhang Yunlong 1,Su Jun 1,Wang Zhibin 1,Guo Xiaogang 1,Zong Wenjun 2,Zhang Lei 2

(1.Xi′an Institute of Applied Optics,Xi′an 710065,China;

2.Center for Precision Engineering,Harbin Institute of Technology,Harbin 150006,China)

Abstract:Single crystal germanium material diffractive optical element (DOE),which possesses unique negative chromatic dispersion and thermal expansion coefficient ,has been widely used in the IR optical field.DOE requires optical surface and transition of phase profile well.Micro-circle single point diamond turning is one of the ways to solve it.Actually it′s difficult to have the proper cutting tool parameters to fit the surface roughness and the transition of phase profile.So there is great sense to study the micro-circle single point diamond turning of DOE.This paper studied the roughness of single crystal Germanium materials affections on the turning parameters and the tool parameters by using the DEFORM 3D software.Then the test was done according to the optimization results of the simulation.The results show that the surface roughness is 4nm when the micro-circle radius of single point diamond turning is 0.1mm.

Key words:single point diamond turning(SPDT);cutting simulation;diffractive optical elements (DOE);

surface roughness

第42卷第11期

红外与激光工程2013年11月

Infrared and Laser Engineering