飞秒激光全息并行加工中的多焦点均一性
飞秒激光全息并行加工中的多焦点均一性
作者：苏亚辉， 汪金礼， 杨亮， 李家文， 黄文浩， SU Ya-hui， WANG Jin-li， YANG Liang， LI Jia-wen ， HUANG Wen-hao
作者单位：苏亚辉,SU Ya-hui(安徽大学 电气工程与自动化学院,安徽合肥230601;安徽大学 计算智能与信号处理教育部重点实验室,安徽合肥230039)， 汪金礼,WANG Jin-li(安徽大学 电气工程与自动化学院,安徽合肥
,230601)， 杨亮,李家文,黄文浩,YANG Liang,LI Jia-wen,HUANG Wen-hao(中国科学技术大学 精密机械与
精密仪器系,安徽合肥,230026)
刊名：
光学精密工程
英文刊名：Optics and Precision Engineering
年，卷(期)：2013,21(8)
参考文献(13条)
1.董贤子;陈卫强;赵震声飞秒脉冲激光双光子微纳加工技术及其应用[期刊论文]-科学通报 2008(01)
2.龚小竞;褚家如;杨建军改进的飞秒激光加工微型光波导方法[期刊论文]-光学精密工程 2007(01)
3.ZHANG Y L;CHENG Q D;XIA H Designable 3D nanofabrication by femtosecond laser direct writing 2010(05)
4.蒋中伟;袁大军;祝安定双光子三维微细加工技术及实验系统的开发[期刊论文]-光学精密工程 2003(03)
5.TORMEN M;BUSINARO L;ALTISSIMO M3D patterning by means of nanoimprinting,X-ray and two-photon lithography 2004
6.SHOJI S;KAWATA S Photofabrication of threedimensional photonic crystals by multibeam laser interference into a photopolymerizable resin[外文期刊] 2000(19)
7.KATO J;TAKEYASU N;ADACHI Y Multiple-spot parallel processing for laser micronanofabrication 2005(04)
8.DONG X Z;ZHAO ZH SH;DUAN X M Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing[外文期刊] 2007(12)
9.HAYASAKI Y;SUGIMOTO T;TAKITA A Variable holographic femtosecond laser processing by use of a spatial light modulator[外文期刊] 2005(03)
10.GITTARD S D;NGUYEN A;OBATA K Fabrication of microscale medical devices by twophoton polymerization with multiple foci via a spatial light modulator 2011(11)
11.LIN H;JIA B H;GUM Dynamic generation of debye diffraction-limited multifocal arrays for direct laser printing nanofabrication 2011(03)
12.KUANG Z;PERRIE W;LIU D Ultra short pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns 2012(19)
13.GERCHBERG R W;SAXTON W O A practical algorithm for the determination of phase from image and diffraction plane pictures 1972
引用本文格式：苏亚辉.汪金礼.杨亮.李家文.黄文浩.SU Ya-hui.WANG Jin-li.YANG Liang.LI Jia-wen.HUANG Wen-hao飞秒激光全息并行加工中的多焦点均一性[期刊论文]-光学精密工程 2013(8)