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±250°/sec Yaw Rate Gyro

ADXRS652

Rev. A

Information furnished by Analog Devices is believed to be accurate and reliable. However , no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. T rademarks and registered trademarks are the property of their respective owners.

FEATURES

Complete rate gyroscope on a single chip Z-axis (yaw rate) response

High vibration rejection over wide frequency 2000 g powered shock survivability Ratiometric to referenced supply 5 V single-supply operation ?40°C to +105°C operation Self-test on digital command

Ultrasmall and light (<0.15 cc, <0.5 gram) Temperature sensor output RoHS compliant

APPLICATIONS

Industrial applications

Inertial measurement units Platform stabilization

GENERAL DESCRIPTION

The ADXRS652 is a complete angular rate sensor (gyroscope) that uses the Analog Devices, Inc., surface-micromachining process to make a functionally complete and low cost angular rate sensor integrated with all of the required electronics on one chip. The manufacturing technique for this device is a patented high volume BiMOS process with years of proven field reliability. ADXRS620 and ADXRS622 gyroscopes. Automotive grade gyroscopes have more guaranteed

minimum/maximum specifications due to automotive testing. The ADXRS652 is an industrial grade gyroscope that is 100% pin, package, temperature, and function compatible to the related automotive grade The output signal, RATEOUT (1B, 2A), is a voltage propor-tional to angular rate about the axis normal to the top surface of the package. The output is ratiometric with respect to a provided reference supply. An external capacitor is used to set the bandwidth. Other external capacitors are required for operation.

A temperature output is provided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test proper operation of both the sensor and the signal condi-tioning circuits. The ADXRS652 is available in a 7 mm × 7 mm × 3 mm BGA chip-scale package.

FUNCTIONAL BLOCK DIAGRAM

5V 08820-001

Figure 1.

ADXRS652

Rev. A | Page 2 of 12

TABLE OF CONTENTS

Features .............................................................................................. 1 Applications ....................................................................................... 1 General Description ......................................................................... 1 Functional Block Diagram .............................................................. 1 Revision History ............................................................................... 2 Specifications ..................................................................................... 3 Absolute Maximum Ratings ............................................................ 4 Rate Sensitive Axis ....................................................................... 4 ESD Caution .................................................................................. 4 Pin Configuration and Function Descriptions ............................. 5 Typical Performance Characteristics ............................................. 6 Theory of Operation .........................................................................9 Setting Bandwidth .........................................................................9 Temperature Output and Calibration .........................................9 Modifying the ADXRS652 Scale to Match the ADXRS620 .....9 Calibrated Performance ................................................................9 ADXRS652 and Supply Ratiometricity ................................... 10 Null Adjustment ......................................................................... 10 Self-Test Function ...................................................................... 10 Continuous Self-Test .................................................................. 10 Outline Dimensions ....................................................................... 11 Ordering Guide .. (11)

REVISION HISTORY

7/10—Rev. 0 to Rev. A

Changed ?40°C to +85°C to ?40°C to +105°C ......... Throughout Changes to General Description Section ...................................... 1 Added Note 3 and Note 4, Table 1 .................................................. 3 Added Modifying the ADXRS652 Scale to Match the ADXRS620 Section ........................................................................... 9 Changes to Ordering Guide . (11)

4/10—Revision 0: Initial Version

ADXRS652

Rev. A | Page 3 of 12

SPECIFICATIONS

All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed.

T A = ?40°C to +105°C, V S = AV CC = V DD = 5 V , V RATIO = AV CC , angular rate = 0°/sec, bandwidth = 80 Hz (C OUT = 0.01 μF), I OUT = 100 μA, ±1 g , unless otherwise noted. Table 1.

Parameter Conditions Min Typ Max Unit SENSITIVITY 1 Clockwise rotation is positive output Measurement Range 2 Full-scale range over specifications range ±2503 ±300 °/sec

Initial and Over Temperature ?40°C to +105°C 7.04

mV/°/sec Temperature Drift 5 ±2 % Nonlinearity Best fit straight line 0.1 % of FS NULL 1 Null ?40°C to +105°C 2.5 V Linear Acceleration Effect Any axis 0.1 °/sec/g NOISE PERFORMANCE Rate Noise Density T A ≤ 25°C 0.06 °/sec/√Hz FREQUENCY RESPONSE Bandwidth 6 0.01 2500 Hz Sensor Resonant Frequency 14.5 kHz SELF-TEST 1 ST1 RATEOUT Response ST1 pin from Logic 0 to Logic 1 ?525 mV ST2 RATEOUT Response ST2 pin from Logic 0 to Logic 1 525 mV ST1 to ST2 Mismatch 7 ?5 +5 % Logic 1 Input Voltage 3.3 V Logic 0 Input Voltage 1.7 V Input Impedance To common 40 50 100 kΩ

TEMPERATURE SENSOR 1

V OUT at 25°C Load = 10 MΩ 2.5 V

Scale Factor 8

25°C, V RATIO = 5 V 9 mV/°C Load to V S 25 kΩ Load to Common 25 kΩ TURN-ON TIME Power on to ±?°/sec of final 50 ms OUTPUT DRIVE CAPABILITY Current Drive For rated specifications 200 μA Capacitive Load Drive 1000 pF POWER SUPPLY Operating Voltage (V S ) 4.75 5.00 5.25 V Quiescent Supply Current 3.5 4.5 mA TEMPERATURE RANGE Specified Performance ?40 +105 °C

1 Parameter is linearly ratiometric with V RATIO .

Measurement range is the maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies. 3

See the section to configure the sensitivity to match the Theory of Operation Theory of Operation ADXRS620 ±300°/sec minimum range. 4

See the section to configure the sensitivity to match the ADXRS620 6 mV/°/sec scale. 5

From +25°C to ?40°C or +25°C to +105°C. 6

Adjusted by external capacitor, C OUT . Reducing bandwidth below 0.01 Hz does not result in further noise improvement. 7

Self-test mismatch is described as (ST2 + ST1)/((ST2 ? ST1)/2). 8

Scale factor for a change in temperature from 25°C to 26°C. V TEMP is ratiometric to V RATIO . See the section for more information.

Temperature Output and Calibration

ADXRS652

Rev. A | Page 4 of 12

ABSOLUTE MAXIMUM RATINGS

Table 2.

Parameter Rating

Acceleration (Any Axis, 0.5 ms)

Unpowered 2000 g

Powered 2000 g

V DD , AV CC ?0.3 V to +6.0 V V RATIO AV CC ST1, ST2 AV CC

Output Short-Circuit Duration

(Any Pin to Common) Indefinite Operating Temperature Range ?55°C to +125°C Storage Temperature Range ?65°C to +150°C Stresses above those listed under the Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability.

Drops onto hard surfaces can cause shocks of greater than 2000 g and can exceed the absolute maximum rating of the device. Care should be exercised in handling to avoid damage.

RATE SENSITIVE AXIS

This is a Z-axis rate-sensing device (also called a yaw rate-sensing device). It produces a positive going output voltage for clockwise rotation about the axis normal to the package top, that is, clockwise when looking down at the package lid. RATE

LONGITUDINAL AXIS

V CC = 5V

GND

08820-002

Figure 2. RATEOUT Signal Increases with Clockwise Rotation

ESD CAUTION

ADXRS652

Rev. A | Page 5 of 12

PIN CONFIGURATION AND FUNCTION DESCRIPTIONS

RATIO

RATEOUT

08820-023

5432

Figure 3. Pin Configuration

Table 3. Pin Function Descriptions

Pin No. Mnemonic Description 6D, 7D CP5 HV Filter Capacitor, 0.1 μF. 6A, 7B CP4 Charge Pump Capacitor, 22 nF. 6C, 7C CP3 Charge Pump Capacitor, 22 nF. 5A, 5B CP1 Charge Pump Capacitor, 22 nF. 4A, 4B CP2 Charge Pump Capacitor, 22 nF.

3A, 3B AV CC Positive Analog Supply. 1B, 2A RATEOUT Rate Signal Output. 1C, 2C SUMJ Output Amp Summing Junction. 1D, 2D NC No Connection. 1E, 2E V RATIO Reference Supply for Ratiometric Output. 1F, 2G AGND Analog Supply Return. 3F, 3G TEMP Temperature Voltage Output. 4F, 4G ST2 Self-Test for Sensor 2. 5F, 5G ST1 Self-Test for Sensor 1. 6G, 7F PGND Charge Pump Supply Return. 6E, 7E

V DD Positive Charge Pump Supply.

ADXRS652

Rev. A | Page 6 of 12

TYPICAL PERFORMANCE CHARACTERISTICS

N > 1000 for all typical performance plots, unless otherwise noted.

4681012141618202.20

2.25

2.30

2.35

2.40

2.45

2.50

2.55

2.60

2.65

2.70

2.75

2.80

P E R C E N T A G E O F P O P U L A T I O N (%)

RATE OUT (V)

08820-004

Figure 4. Null Output at 25°C (V RATIO = 5 V)

10203040506070–400

–350

–300

–250

–200

–150

–100

–50

100

150

200

250

300

350

400

P E R C E N T A G E O F P O P U L A T I O N (%)

mV DRIFT FROM

25°C

08820-005

Figure 5. Null Drift over Temperature (V RATIO

= 5 V)

6.3

6.4

6.5

6.7

6.6

6.9

6.8

7.0

7.1

7.3

7.2

7.5

7.4

7.7

7.6

7.8

P E R C E N T A G E O F P O P U L A T I O N (%)

(mV/°/sec)

08820-006

Figure 6. Sensitivity at 25°C (V RATIO = 5 V) 0

5101520302535P E R C E N T A G E O F P O P U L A T I O N (%)

PERCENT CHANGE FROM 25°C

–10

–8

–6

–4

–2

08820-007

Figure 7. Sensitivity Drift over Temperature

5101520253540P E R C E N T A G E O F P O P U L A T I O N (%)

ST1 Δ (mV)

30–675

–650

–625

–600

–575

–550

–525

–475

–500

–450

–425

–400

–37

508820-008

Figure 8. ST1 Output Change at 25°C (V RATIO = 5 V)

5101520253540P E R C E N T A G E O F P O P U L A T I O N (%)

ST2 Δ (mV)

30375

400

425

450

475

500

525

575

550

600

625

650

08820-009

Figure 9. ST2 Output Change at 25°C (V RATIO = 5 V)

ADXRS652

Rev. A | Page 7 of 12

10203040605070–5

–4

–3

–2

–1

P E R C E N T A G E O F P O P U L A T I O N (

PERCENT MISMATCH (%)

08820-010

Figure 10. Self-Test Mismatch at 25°C (V RATIO = 5 V)

600400

200

400

600

–50

–30–10

1030TEMPERATURE (°C)

507090110

S E L F -T E S T Δ (m V )

ST1

ST2

08820-011

Figure 11. Typical Self-Test Change over Temperature

2.5

2.7

2.9

3.1

3.3

3.5

3.7

3.9

4.1

4.3

4.5

P E R C E N T A G E O F P O P U L A T I O N (%)

CURRENT CONSUMPTION (m A)

08820-012

Figure 12. Current Consumption at 25°C (V RATIO

= 5 V) 0

2.35

2.37

2.39

2.41

2.43

2.45

2.47

2.49

2.51

2.53

2.55

VOLTAGE (V)

P E R C E N T A G E O F P O P U L A T I O N (%)

08820-013

Figure 13. V TEMP Output at 25°C (V RATIO

= 5 V)

1.51.7

1.9

2.12.32.52.7

2.9

3.1

3.3–50

–250

25TEMPERATURE (°C)

75100

V O L T A G E (V )

08820-114

Figure 14. V TEMP Output over Temperature, 256 Parts (V RATIO = 5 V)

503040

1020–20–100

750

770810830850

790

g O R °/s e c

TIME (ms)

08820-014

Figure 15. g and g × g Sensitivity for a 50 g , 10 ms Pulse

ADXRS652

Rev. A | Page 8 of 12

00.2

0.40.60.81.01.21.62.01.41.8100

10k P E A K R A T E O U T (°/s )

FREQUENCY (Hz)

08820-116

Figure 16. Typical Response to 10 g Sinusoidal Vibration

(Sensor Bandwidth = 40 Hz)

400300

2001000–100–200–300–400

TIME (ms)

R A T E O F R O T A T I O N (°/s e c )

08820-016

Figure 17. Typical High g (2500 g ) Shock Response

(Sensor Bandwidth = 40 Hz)

0.1

0.01

0.001

0.01

0.1

100k

10k

100

AVERAGING TIME (Seconds)

R O O T A L L A N D E V I A T I O

N (°/s e c r m s )

08820-017

Figure 18. Typical Root Allan Deviation at 25°C vs. Averaging Time

0.10

–0.05

0.05

–0.10

TIME (Hours)

R A T E O F R O T A T I O N (°/s e c )

08820-018

Figure 19. Typical Shift in 90 sec Null Averages Accumulated

over 140 Hours

0.10

0.05

–0.05

–0.10

03600

1800120030002400600TIME (Seconds)

R A T E O F R O T A T I O N (°/s e c )

08820-019

Figure 20. Typical Shift in Short Term Null (Bandwidth = 1 Hz)

0.1

0.001

0.01

0.0001

100k

100FREQUENCY (Hz)

N O I S E S P E C T R A L D E N S I T Y (°/s e

c H z r m s )

10k 08820-020

Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz)

ADXRS652

Rev. A | Page 9 of 12

THEORY OF OPERATION

0.1

0.01

0.000001

0.00001

0.0001

0.001

100k

100FREQUENCY (Hz)

N O I S E S P E C T R A L

E N S I T Y (°/s e c H z r m s )

10k 08820-021

The ADXRS652 operates on the principle of a resonator gyro. Two polysilicon sensing structures each contain a dither frame that is electrostatically driven to resonance, producing the neces-sary velocity element to produce a Coriolis force during angular rate. At two of the outer extremes of each frame, orthogonal to the dither motion, are movable fingers that are placed between fixed pickoff fingers to form a capacitive pickoff structure that senses Coriolis motion. The resulting signal is fed to a series of gain and demodulation stages that produce the electrical rate signal output. The dual-sensor design rejects external g -forces and vibration. Fabricating the sensor with the signal conditioning electronics preserves signal integrity in noisy environments. The electrostatic resonator requires 18 V to 20 V for operation. Because only 5 V are typically available in most applications, a charge pump is included on chip. If an external 18 V to 20 V supply is available, the two capacitors on CP1 to CP4 can be omitted, and this supply can be connected to CP5 (Pin 6D, Pin 7D). CP5 should not be grounded when power is applied to the ADXRS652. No damage occurs, but under certain conditions, the charge pump may fail to start up after the ground is removed without first removing power from the ADXRS652.

Figure 22. Noise Spectral Density with Additional 250 Hz Filter

TEMPERATURE OUTPUT AND CALIBRATION

It is common practice to temperature-calibrate gyros to improve their overall accuracy. The ADXRS652 has a temperature propor-tional voltage output that provides input to such a calibration method. The temperature sensor structure is shown in Figure 23. The temperature output is characteristically nonlinear, and any load resistance connected to the TEMP output results in decreasing the TEMP output and its temperature coefficient. Therefore, buffering the output is recommended.

SETTING BANDWIDTH

External Capacitor C OUT is used in combination with the on-chip R OUT resistor to create a low-pass filter to limit the bandwidth of the ADXRS652 rate response. The ?3 dB frequency set by R OUT and C OUT is

The voltage at TEMP (3F, 3G) is nominally 2.5 V at 25°C, and V RATIO = 5 V . The temperature coefficient is ~9 mV/°C at 25°C. Although the TEMP output is highly repeatable, it has only modest absolute accuracy.

()OUT OUT OUT C R f ×××=π2/1

and can be well controlled because R OUT has been trimmed during manufacturing to be 180 kΩ ± 1%. Any external resistor applied between the RATEOUT pin (1B, 2A) and SUMJ pin (1C, 2C) results in

V TEMP

08820-022

Figure 23. Temperature Sensor Structure

()()EXT EXT OUT R R R +×=kΩ180/kΩ180

MODIFYING THE ADXRS652 SCALE TO MATCH THE ADXRS620

In general, an additional filter (in either hardware or software) is added to attenuate high frequency noise arising from demodu-lation spikes at the 14 kHz resonant frequency of the gyro. The noise spikes at 14 kHz can be clearly seen in the power spectral density curve, shown in Figure 21. Normally, this additional filter corner frequency is set to greater than five times the required bandwidth to preserve good phase response. The ADXRS652 scale factor can be modified to match the 6 mV/°/sec scale factor of the ADXRS620 by adding a single 1.07 MΩ resistor between the RATEOUT and SUMJ. No other performance characteristics are affected by adding this resistor.

CALIBRATED PERFORMANCE

Figure 22 shows the effect of adding a 250 Hz filter to the output of an ADXRS652 set to 40 Hz bandwidth (as shown in Figure 21). High frequency demodulation artifacts are attenuated by approximately 18 dB.

Using a three-point calibration technique, it is possible to calibrate the ADXRS652 null and sensitivity drift to an overall accuracy of nearly 200°/hour. An overall accuracy of 40°/hour or better is possible using more points. Limiting the bandwidth of the device reduces the flat-band noise during the calibration process, improving the measurement accuracy at each calibration point.

ADXRS652

Rev. A | Page 10 of 12

ADXRS652 AND SUPPLY RATIOMETRICITY

The ADXRS652 RATEOUT and TEMP signals are ratiometric to the V RATIO voltage; that is, the null voltage, rate sensitivity, and temperature outputs are proportional to V RATIO . So the ADXRS652 is most easily used with a supply-ratiometric analog-to-digital converter, which results in self-cancellation of errors due to minor supply variations. There is some small error due to nonratiometric behavior. Typical ratiometricity error for null, sensitivity, self-test, and temperature output is outlined in Table 4. Note that V RATIO must never be greater than AV CC . Table 4. Ratiometricity Error for Various Parameters

Parameter V S = V RATIO = 4.85 V V S = V RATIO = 5.15 V ST1 M ean 0.3%

0.09% Sigma 0.21% 0.19% ST2 M ean ?0.15%

?0.2% Sigma 0.22% 0.2% Null M ean ?0.3%

?0.05% Sigma 0.2% 0.08% Sensitivity

M ean 0.003%

?0.25% Sigma 0.06% 0.06% V TEMP

M ean ?0.2%

?0.04% Sigma 0.05%

0.06%

NULL ADJUSTMENT

The nominal 2.5 V null is for a symmetrical swing range at RATEOUT (1B, 2A). However, a nonsymmetric output swing may be suitable in some applications. Null adjustment is possible by injecting a suitable current to SUMJ (1C, 2C). Note that supply disturbances may reflect some null instability. Digital supply noise should be avoided, particularly in this case. SELF-TEST FUNCTION

The ADXRS652 includes a self-test feature that actuates each of the sensing structures and associated electronics in the same manner, as if subjected to angular rate. It is activated by standard logic high levels applied to Input ST1 (5F, 5G), Input ST2 (4F, 4G), or both. ST1 causes the voltage at RATEOUT to change about ?0.5 V , and ST2 causes an opposite change of +0.5 V . The self-test response follows the viscosity temperature dependence of the package atmosphere, approximately 0.25%/°C. Activating both ST1 and ST2 simultaneously is not damaging. ST1 and ST2 are fairly closely matched (±5%), but actuating both simultaneously may result in a small apparent null bias shift proportional to the degree of self-test mismatch. ST1 and ST2 are activated by applying a voltage equal to V RATIO to the ST1 pin and the ST2 pin. The voltage applied to ST1 and ST2 must never be greater than AV CC .

CONTINUOUS SELF-TEST

The on-chip integration of the ADXRS652 gives it higher reliability than is obtainable with any other high volume manufacturing method. Also, it is manufactured under a mature BiMOS process that has field-proven reliability. As an additional failure detection measure, power-on self-test can be performed. However, some applications may warrant continuous self-test while sensing rate. Details outlining continuous self-test techniques are also available in the AN-768 Application Note.

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